JPH0284249U - - Google Patents

Info

Publication number
JPH0284249U
JPH0284249U JP16416188U JP16416188U JPH0284249U JP H0284249 U JPH0284249 U JP H0284249U JP 16416188 U JP16416188 U JP 16416188U JP 16416188 U JP16416188 U JP 16416188U JP H0284249 U JPH0284249 U JP H0284249U
Authority
JP
Japan
Prior art keywords
ion source
source chamber
coil
magnetic field
microwave oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16416188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16416188U priority Critical patent/JPH0284249U/ja
Publication of JPH0284249U publication Critical patent/JPH0284249U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP16416188U 1988-12-19 1988-12-19 Pending JPH0284249U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16416188U JPH0284249U (en]) 1988-12-19 1988-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16416188U JPH0284249U (en]) 1988-12-19 1988-12-19

Publications (1)

Publication Number Publication Date
JPH0284249U true JPH0284249U (en]) 1990-06-29

Family

ID=31449530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16416188U Pending JPH0284249U (en]) 1988-12-19 1988-12-19

Country Status (1)

Country Link
JP (1) JPH0284249U (en])

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